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Current position: Home > Product > Ionizing Bar
Modulated Pulse Aerobar   5635 (M)

The Model 5635 AeroBar MP ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. It utilizes MP technology, combining a high frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644-1 Class 1 (0.1 mm particles) cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances. MP technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. The 5635 AeroBars come with 50 mm emitter spacing for lengths ≤ 600 mm for the most dense, uniform ionization coverage.







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